| 학회 |
한국화학공학회 |
| 학술대회 |
2015년 봄 (04/22 ~ 04/24, 제주 ICC) |
| 권호 |
21권 1호, p.789 |
| 발표분야 |
재료 |
| 제목 |
Low cost and highly reliable fabrication route of chemical and biological nanowire sensor |
| 초록 |
Semiconductor nanowire field effect transistors (NWFETs) have attracted strong research interest as a platform for specific identification of biomolecules in life sciences. The conventional fabrication methods of NWFETs with the well-established bottom-up approach have been demonstrated as a promising platform of various applications in life science so far, but still suffer from their inherent drawback of mass production. To address these issues, we developed a novel top-down approach ZnO NWFETs in this work. This work is composed of sequential processes of ZnO thin film deposition, nano-imprinting lithography and low-damage dry etching, leading to a reasonable alternative for the low cost mass productions. Furthermore, the optimized ZnO NWFETs with effective surface functionalization polymer-like amorphous carbon (PAC) are demonstrated to achieve high performance of the conventional bottom-up based devices in terms of the real-time detections of pH sensing and biological sensing application. Finally, various aspects in terms of chemical and biological sensing behaviors were compared to the conventional bottom-up based NWFETs with high performance. |
| 저자 |
유찬석1, 김진태1, 정희춘1, 안의진1, 유혜성1, 이수한2, 최대근2, 임연호1
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| 소속 |
1전북대, 2한국기계(연) |
| 키워드 |
bio sensor; ZnO Nanowire; Field Effect Transistors
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| E-Mail |
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| VOD |
VOD 보기 |
| 원문파일 |
초록 보기 |
