| 학회 |
한국재료학회 |
| 학술대회 |
2019년 가을 (10/30 ~ 11/01, 삼척 쏠비치 호텔&리조트) |
| 권호 |
25권 2호 |
| 발표분야 |
D. 구조 재료 분과 |
| 제목 |
Effects of Alumina Contamination from Ball Milling Process on Thermal Conductivity of AlN Substrate Prepared by Tape Casting Method |
| 초록 |
We fabricated the AlN substrate using tape casting method and investigated the effect of oxygen content on bulk density and thermal conductivity. Oxygen content was measured according to ball milling time and type of ball, and residual oxygen content was also investigated after the debinding process. As a result, oxygen content after ball milling was in the range of 0.8 to 1.7 wt% and similar values were shown after debinding process. The debinded specimen was sintered at 1850oC for 4 h in the N2 atmosphere. As a result, when the residual oxygen content was 1.7 wt%, the bulk density was found to be lowest with 3.17 g/cm3, and the thermal conductivity was 90 W/m∙K, degrading the sintering properties. |
| 저자 |
김시연1, 최동규1, 여동훈1, 신효순1, 윤호규2
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| 소속 |
1한국세라믹기술원, 2고려대 |
| 키워드 |
AlN; Tape casting; Thermal conductivity
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| E-Mail |
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