| 학회 |
한국고분자학회 |
| 학술대회 |
2002년 가을 (10/11 ~ 10/12, 군산대학교) |
| 권호 |
27권 2호, p.278 |
| 발표분야 |
고분자 구조 및 물성 |
| 제목 |
The effect of interaction of MSSQ copolymer and porogen on nanoporous low-k thin film structure |
| 초록 |
Recently, nanoporous low-k materials using porogen (pore generating material) template method have gained much attraction due to the feasible advantage of dielectric constant decrease with the increase of porogen content, which is burning out and making air void by thermal curing. In nanoporous thin films, further, control of pore size and its distribution is very important to retain suitable thermal, mechanical and electrical properties. In this study, nanoporous low-k films were prepared with MTMS-BTMSE copolymer and porogen. The effect of interaction of copolymer matrix and porogen on pore size and distribution was comparatively to investigate with molecular structure and end functional group. The characterization of nanoporous thin film prepared was also performed using various techniques including NMR, GPC, Ellipsometer, FE-SEM, TGA, and FT-IR. |
| 저자 |
최연승1, 김상율*2, 진문영**3, 이창진**4, 차국헌***
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| 소속 |
1서울대, 2*한국과학기술원 화학과, 3**한국화학(연), 4***서울대 |
| 키워드 |
nanoporous thin film; low-k; end functional group; MSSQ
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| E-Mail |
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