| 학회 |
한국재료학회 |
| 학술대회 |
2005년 가을 (11/10 ~ 11/11, 한양대학교) |
| 권호 |
11권 2호 |
| 발표분야 |
전자재료 |
| 제목 |
수소 혼합 가스 분위기에서 RF 마그네트론 스퍼터로 증착한 ZnO:Al 박막의 특성 |
| 초록 |
AZO (ZnO:Al) films were fabricated by RF magnetron sputtering in H2/Ar (5% H2) atmosphere, and electrical and optical properties were investigated. The substrate temperatures were varied at RT, 100℃, 150℃ and 200℃. The resistivity of the films grown in H2/Ar (5% H2) was reduced from 7.67 × 10-4 to 5.95 × 10-4 in comparison with that of films deposited in Ar (100%) and the transmittance in wavelength range of 200~500 nm was over 93% |
| 저자 |
이정섭, 허재성, 백상열, 이병훈, 송정빈, 최인훈
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| 소속 |
고려대 |
| 키워드 |
transparent conductive oxide; hydrogen atmosphere
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| E-Mail |
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