| 학회 |
한국재료학회 |
| 학술대회 |
2006년 봄 (05/19 ~ 05/20, 경상대학교 ) |
| 권호 |
12권 1호 |
| 발표분야 |
반도체재료 |
| 제목 |
RF 마그네트론 스퍼터링법으로 제조한 다성분계 ZnO-In2O3-SnO2 박막에 관한 연구(A study on multi-component ZnO-In2O3-SnO2 thin films deposited by RF magnetron sputtering) |
| 초록 |
Transparent and conductive indium-tin oxide (ITO) films are widely used as transparent conducting oxides (TCO) for optical device such as plat panel displays, solar cells, light emitting diodes. However, when ITO films are deposited at low temperature, they have a low resistance to moist heat, a decrease of the electrical conductivity and light transmittance with time and poor chemical stability. TCO films consisting of binary compounds are ultimately limited in their application due to dependence on the intrinsic properties of the material. For the purpose of optimizing electrical, optical and chemical properties for specialized applications, multi-component oxides consisting of a combination of different oxides such as ternary or multi-compounds have attracted much attention as new materials for TCO films. Multi-component ZnO-In2O3-SnO2 thin films have been prepared by RF magnetron co-sputtering using targets composed of In3Sn4O12(99.99%) and ZnO(99.99%) at room temperature. In3Sn4O12 contains less In than commercial ITO, so that it lowers cost. Working pressure was held at 3 mtorr flowing Ar gas 20 sccm and sputtering time was 30 min. RF power ratio [RF1 / ( RF1 + RF2 )] of two guns in sputtering system was varied from 0 to 1. RF powers were varied 0~100W respectively. The composition concentrations of the each film were measured with EPMA. In this work the electrical, optical properties of multi-component ZnO-In2O3-SnO2 thin films changed as the each component was varied. This material is promising as TCO film because of its low cost in comparison with ITO films with a high In content. |
| 저자 |
이병훈1, 허재성1, 이정섭1, 송정빈1, 김태훈1, 손창식2, 최인훈1
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| 소속 |
1고려대, 2신라대 |
| 키워드 |
ZnO; In3Sn4O12; TCO
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| E-Mail |
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