| 초록 |
Micro-supercapacitors (MSCs) with high energy density are in great demand due to its wide application for energy storage devices. Here, we demonstrate a composite electrode of a 3D carbon pattern fabricated using carbonization of 3D interference lithography, coated with a thin film shell of MnO2 and PANI by electrodeposition. Then, plasma etching is performed on the electrode to obtain an interdigitated electrode, and a polymer electrolyte is applied to complete the MSC. MnO2 and PANI-coated carbon pattern MSCs achieve high areal capacitance with excellent cycle stabilities. |
