| 학회 |
한국재료학회 |
| 학술대회 |
2007년 가을 (11/02 ~ 11/02, 성균관대학교) |
| 권호 |
13권 2호 |
| 발표분야 |
반도체재료 |
| 제목 |
Effect of substrate temperature on the electrical, structural and optical properties of Ag doped ZnO thin films |
| 초록 |
The effect of substrate temperature on the structural, electrical and optical properties of Ag doped ZnO (SZO) thin films were investigated. All of the films were deposited with targets of 2 wt.% of Ag2O content using an e-beam evaporator and the substrate temperature varied from room temperature to 250oC. All of the deposited films were annealed in a temperature range between 350 - 650°C for 5 h in air. As deposited SZO thin films showed p-type conductivity except a sample fabricated at room temperature, and the films fabricated at 150oC showed the highest hole concentration of 3.98×1019 cm-3. As deposited thin films were randomly oriented and intensities of peaks increased as the heat treatment temperature increased. The thin films deposited at 150oC showed the highest UV emission intensity. |
| 저자 |
정은경, 김인수, 김대현, 최세영
|
| 소속 |
연세대 |
| 키워드 |
ZnO; Ag doping; thin film; luminescence; e-beam evaporator
|
| E-Mail |
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