화학공학소재연구정보센터
학회 한국재료학회
학술대회 2019년 가을 (10/30 ~ 11/01, 삼척 쏠비치 호텔&리조트)
권호 25권 2호
발표분야 A. 전자/반도체 재료 분과
제목 High performance of low-E coating on glass substrate with transparent amorphous oxide semiconductor
초록 Low emissivity glass for high transparency in the visible range and low emissivity in the IR (infrared) range was investigated. Utilizing amorphous semiconductor material of Si-In-Zn-O (SIZO) and metal Ag, oxide-metal-oxide (OMO) low-emissivity (low-E) coatings were deposited onto glass substrates at room temperature (RT). It is known that optical and electrical properties of OMO multilayers are very sensitive to the thickness of middle Ag layer. Experimentally, by adjusting the thickness of middle Ag layers, it was found that optimal Ag thickness is 11 nm. Under optimal conditions, OMO multilayer shows high transmittance about 90% in visible region, and high reflectivity above 90% at 2200 nm. Also, flexibility and adhesion were proved through bending test. Experimental results indicated that SIZO-Ag-SIZO is promising for high performance and cost-effective low-E coating fabrication.
저자 Jin Young Hwang1, Sang Yeol Lee2
소속 1Department of semiconductor engineering, 2Cheongju Univ.
키워드 Amorphous oxide semiconductor; Transparency; OMO; Low-e
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