| 학회 | 한국재료학회 |
| 학술대회 | 2011년 봄 (05/26 ~ 05/27, 제주 휘닉스 아일랜드) |
| 권호 | 17권 1호 |
| 발표분야 | B. Nanomaterials and Processing Technology((나노소재기술) |
| 제목 | Fabrication of thin film capacitor using electroless nickel plating |
| 초록 | According to currently using thin film capacitors as vehicle inverters are small size, high capacitance, high voltage, fast response and large capacitance. But its applications were made up of liquid as electrolyte, so its capacitors are limited to low operating temperature range and the polarity. Al electrolytic capacitor is normally composed of an anode foil with anodic aluminum oxide (AAO), dielectric layer and cathode foil. Instead of its composition, this research was suggested about using Ni metal by electroless plating as the electrode. Our substrate has a high aspect ratio and complicated shape due to anodized anodic aluminum oxide. The anodized AAO was activated by palladium solution. Then, the activated substrate was rinsed with deionized water and dried. When the dry process was terminated, the sample was immersed into electroless nickel solution to educe the nickel and then it was dried on a hotplate at 120℃. The synthesized final nanostructures were characterized by scanning electron microscopy (SEM). The resistances and electrical properties were measured, respectively. By using electroless nickel plating for electrode, the capacitance density for the etched and Ni electroless plated films was 0.06㎌㎝-2 while that for a film without any etch tunnel was 12.5 ㎋㎝-2. |
| 저자 | Myung-sun Jeong1, Byeong-Kwon Ju2, Young-Jae Oh3, Jeon-Kook Lee4 |
| 소속 | 1Optoelectronic Materials Center, 2Korea Institute of Science and Technology, 3Display and Nanosystem Laboratory, 4College of Engineering |
| 키워드 | thin film capacitor; Electroless nickel plating; Aluminum anode oxide (AAO) |
