| 학회 |
한국재료학회 |
| 학술대회 |
2012년 봄 (05/17 ~ 05/18, 무주덕유산리조트) |
| 권호 |
18권 1호 |
| 발표분야 |
A. 전자/반도체 재료(Electronic and Semiconductor Materials) |
| 제목 |
Characteristics of IGZO Grown by RF Magnetron Sputtering |
| 초록 |
The structural, optical, and electrical properties of IGZO (IGZO) thin films on glass substrates grown by radio-frequency (RF) magnetron sputtering were investigated. The structural properties and surface morphologies of IGZO were characterized by the X-ray diffraction. To analyze the optical properties of IGZO, the optical absorbance was measured in the wavelength range of 400-1100 nm by using UV-VIS spectrophotometer. The optical transmittance, absorption coefficient, and optical bandgap energy of IGZO thin films were calculated from the measured data. The characteristics of high-quality IGZO thin films are affected with the varying deposition parameter. We can optimize the characteristics of IGZO as a transparent electrode for thin film solar cells by controlling deposition parameters. |
| 저자 |
Seung Jin Lee, Chang-Sik Son, Sang Bongm Jin, Yong O Sim, Ho Hwan Sung
|
| 소속 |
Silla Univ. |
| 키워드 |
Solar Cell |
| E-Mail |
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