| 학회 |
한국재료학회 |
| 학술대회 |
2010년 봄 (05/13 ~ 05/14, 삼척 팰리스 호텔) |
| 권호 |
16권 1호 |
| 발표분야 |
B. Nanomaterials Technology (나노소재기술) |
| 제목 |
Synthesis and Verification of Mo-Oxide Thin Films Obtained by RF Magnetron Sputtering |
| 초록 |
We synthesized Mo-oxide thin films by radio frequency magnetron sputtering method and the deposited Mo-oxide thin films were verified applying various surface analysis techniques. The chemical properties of these films were studied with X-ray photoelectron spectroscopy (XPS). Physical properties of the resultant films were investigated with X-ray diffraction (XRD) and spectroscopic ellipsometry (SE) methods. The roughness of molybdenum oxide is will be confirmed by atomic force microscope (AFM). The thickness of molybdenum oxide thin films was deduced by SE and scanning electron spectroscopy (SEM) images revealed the thickness of the films lied in the range of 900 nm. When the ratio of oxygen in the sputter gas increased, the film thickness was drastically decreased. The ratio of metallic Mo species decreased but the contents of Mo6+ species increased as the function of oxygen gas ratio in the sputter gas. |
| 저자 |
Joon Hyung Bihn1, Ju Yun Park2, Jun Mo Jo1, Yong Cheol Kang2
|
| 소속 |
1Department of Chemistry, 2Pukyong National Univ. |
| 키워드 |
Molybdenum oxide; CIGS; RF Magnetron Sputtering
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| E-Mail |
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