| 초록 |
Magnetic properties of the electrodeposited of binary CoPt and ternary CoPtP thin films were systematically investigated by varying the several electrodeposition parameters such as electrolyte composition (i.e. Co2+ and Pt4+ ion concentrations), solution pH, and current density for binary CoPt thin films and electrolyte composition (i.e. NaH2PO2 concentration) and current density for the ternary CoPtP thin films, respectively. Dependences of several electroplating parameters on current efficiency, film composition, magnetic properties (i.e. coercivity and squareness) and microstructure were studied. For the binary CoPt thin films, the maximum coercivities (Hc,// = ~1600 Oe, and Hc,⊥ = ~2500 Oe) were measured at the deposit conditions including 0.01 M H2PtCl6, 0.04 M Co-pyrophosphate, 7.5 mA∙cm-2 and solution pH 8. In the case of the ternary CoPtP thin films, the maximum coercivities (Hc,// = ~2600 Oe, and Hc,⊥ = ~3800 Oe) were obtained at the deposit conditions including 0.015 M H2PtCl6, 0.07 M Co-pyrophosphate, 0.8 M NaH2PO2, 7.5 mA∙cm-2 and solution pH 9.
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