화학공학소재연구정보센터
학회 한국재료학회
학술대회 2007년 가을 (11/02 ~ 11/02, 성균관대학교)
권호 13권 2호
발표분야 반도체재료
제목 Formation of various metal nanodot array by using diblock copolymer templates.
초록 Recently, various nanopatterning technologies have been developed, which aim for well-ordered nanostructures over large areas. Diblock copolymer is fascinating material for that purpose. A self-assembly property of diblock copolymer makes it possible to provide diverse high-density nanostructures over large dimensions with low cost. In particular, asymmetric diblock copolymer PS-b-PMMA offers hexagonally ordered high-density nanoporous templates to fabricate metal nanodot array. Here we demonstrate a simple process to produce an array of metal nanodots by using asymmetric diblock copolymer thin film which shows cylinderical phase separation morphology. We also present the control of nanodot dimensions by adjusting molecular weight of diblock copolymer.
저자 이형민, 정성준, 김봉훈, 신동옥, 박승학, Guodong Xia, Quoc Dat Nghiem, 김상욱
소속 한국과학기술원 신소재공학과
키워드 metal nanodot; diblock copolymer; self assembly
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