| 학회 |
한국재료학회 |
| 학술대회 |
2004년 봄 (05/14 ~ 05/14, 강릉대학교) |
| 권호 |
10권 1호 |
| 발표분야 |
세라믹스 |
| 제목 |
DC 마그네트론 스퍼터링에 의한 보론카바이드 증착막의 기계적 특성 |
| 초록 |
The boron carbide thin coatings were deposited using DC magnetron sputtering technique using a target of B4C with Ar as the processing gas. Various amounts of methane gas were added during the deposition process. Reciprocating wear tests employing a micro-oscillating friction wear tester were performed to investigate the tribological behaviors of the coatings in ambient environment. The coefficient of friction was reduced approximately from 0.4 to 0.1, and wear resistance was improved considerably by increasing the ratio of CH4 gas component from 0 to 1.2%. THe chemical characteristics of the coatings and worn surfaces were studied using XPS and AES. It was revealed that CH4 addition to Ar processing gas strongly affected the tribological properties of sputtered boron carbide coating. By adding a sufficient amount of CH4 (1.2%) during deposition process, the boron carbide coating exhibited low friction and high wear resistance. |
| 저자 |
이광은1, 김종오1, 김종희2, 박명진3
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| 소속 |
1충남대, 2고기능성자성재료연구센터, 3(주) 샘텍 |
| 키워드 |
Boron carbide; DE magnetron sputtering; XPS; AES
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| E-Mail |
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