| 초록 |
Due to the high-strength, high-performance, and high-functionalization of electronic device, semiconductor processes are refined, and thus studies on the characteristics of dielectric thin films that ensure electric capacity and reduce leakage current are being steadily conducted. Through structural control of polyimide having low dielectric properties, polyimide having a high dielectric constant and excellent thermal and mechanical stability was synthesized. In order to adjust a high dielectric constant, polyimide was synthesized through chemical imidization based on various seven types of diamine and 6FDA dianhydride introduced with a carboxyl functional group and adjustment of the number of side carbon atoms of the diamine monomer. After that, spectroscopic properties of polyimide were analyzed through FT-NMR, FT-IR, and XRD. The dielectric constant was measured using LCR meter to analyze the electrical properties, and the thermal properties were analyzed through TGA and DSC. |
