| 학회 |
한국재료학회 |
| 학술대회 |
2011년 가을 (10/27 ~ 10/29, 신라대학교) |
| 권호 |
17권 2호 |
| 발표분야 |
B. Nanomaterials and Processing Technology(나노소재기술) |
| 제목 |
Transfer-printed electrode on nano-rough P(VDF-TrFE) thin film surface for high-performance MFM capacitors |
| 초록 |
Transfer-printing of top electrode in MFM capacitor with nano-rough ferroelectric P(VDF-TrFE) polymer has been demonstrated. For the generation of nanoscale roughness on P(VDF-TrFE) thin films, ‘breath figure’ phenomenon has been exploited, i.e., spin-casting of polymer solution under humid condition. Compared to smooth film prepared under dry condition, cratered surface has been generated under humid condition, with crater diameter of ~1um and depth of ~100nm. It has been found that conventional evaporation of electrode on such cratered surface leads to electrical short in metal-ferroelectric-metal capacitors. On the other hand, transfer-printing of electrode, which is pre-formed on elastomeric stamp, on the rough surface has been found to be simple and reliable method for MFM capacitor, without any electrical short. Further, an analysis of MFM capacitor characteristics that is fabricated by the transfer-printing method will be given, based on simple geometric argument. |
| 저자 |
Donyoung Kim1, Dahl-Young Khang2
|
| 소속 |
1Department of Materials Science and Engineering, 2Yonsei Univ. |
| 키워드 |
transfer-printing; ferroelectric; capacitor; P(VDF-TrFE); breath figure
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| E-Mail |
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