| 초록 |
Barium zirconate-cerate co-doped with Y and Yb (BZCYY, BZCYYb) electrolyte thin films were fabricated by electron beam vapor deposition method for the intermediated temperature SOFC application. The influence of substrate temperature, annealing temperature, film thickness, and electrolyte composition on the structural and electrical properties of the BZCYYb thin films was examined. The crystal structure of the electrolyte films was analyzed by an XRD. Microstructure of the thin films was observed by a FESEM. The electrochemical properties of the thin films were analyzed using a 2-probe AC impedance method using an impedance analyzer. We obtained uniform and crack-free BZCYY and BZCYYb electrolyte thin films with a thickness of about 1-5μm. The XRD patterns indicated that the primary orientation of the crystal structure of the BZCYYb film remained the same as those of the evaporation pellets. |
