화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2013년 봄 (04/11 ~ 04/12, 대전컨벤션센터)
권호 38권 1호
발표분야 고분자구조 및 물성
제목 Fabrication of 10nm scale nano-pattern on the flexi-ble substrates by secondary sputtering phenomenon and its application to flexible transparent conducting film
초록 Flexible transparent electrodes with the combination of high transmittance, electrical conductivity and flexibility are essential for the flexible organic solar cell, light-emitting diodes. Currently, indium tin oxide (ITO) coated film is most often used because ITO has high transparency to visible light and low sheet resistance for electrical current conduction. However, ITO is costly due to limited resources and it is easily brittle. So it is difficult to apply to the flexible electronics. Recently, advances in nano materials research have opened the door for other transparent conductive materials like CNT, graphene, and nanowire. Here we report alternative metallic line pattern for flexible transparent electrodes. This sub 20nm metallic nano pattern on the PDMS is fabricated by secondary sputtering phenomenon with low angle ion milling step and it almost corresponds to transmittance and conductivity compared to the ITO. And metal nanowire has higher flexibility than ITO
저자 장성우, 전환진, 안승건, 김명량, 정희태
소속 KAIST
키워드 soft electronics; flexible; nano patterning; secondary sputtering phenomenon
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