| 초록 |
Although silicon carbide (SiC) is a material of excellent acid resistance, additional protection is needed for SiC to withstand the severe condition of semiconductor washing step, in which HF/H2O2 or H2SO4 is used at higher temperature for a long period of time. The improved surface hydrophobicity of SiC is effective in preventing the deterioration of physical properties due to the corrosion of surface in acidic condition. Fluorine-containing material was coated on SiC surface to increase the surface hydrophobicity using a wet coating method. Perfluoroalkylsilane, which contained silane groups capable of coupling with SiC surface, was used as a coating material. Fluorine group coated on SiC surface was confirmed by FTIR-ATR. The morphology of surface treated SiC was studied using SEM/AFM. The chemical resistance of SiC was evaluated in a harsh acidic condition. |
