| 학회 |
한국화학공학회 |
| 학술대회 |
2008년 가을 (10/23 ~ 10/24, 부산 BEXCO) |
| 권호 |
14권 2호, p.2669 |
| 발표분야 |
분리기술 |
| 제목 |
Cloud Point of Amine Mixture in Supercritical Carbon Dioxide |
| 초록 |
Cloud point of the Amine Compound with Fluorosurfactant in Supercritical Carbon Dioxide has been investigated. The amine Compound was used as additives for the supercritical carbon dioxide, because only CO2 could not remove completely photo resist used for semiconductor manufacturing process. The cloud point is a necessary factor for Supercritical CO2 Resist Removal (SCORR) process. The cloud points were measured using a high pressure variable-volume view cell. All systems exhibited a lower critical solution temperature phase behavior and became one-phase in carbon dioxide in the range of 313.15 to 353.15 K at less than 40 MPa. |
| 저자 |
원종우, 임종성, 장원호, 유기풍, 한갑수
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| 소속 |
서강대 |
| 키워드 |
cloud point; supercritical carbon dioxide
|
| E-Mail |
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| 원문파일 |
초록 보기 |
