| 초록 |
Printing technology has been used recently to produce printed electronics on flexible substrates made by PI (Polyimide) and PET (Poly-Ethylene-Terephthalate), etc. The benefits of using printing technologies such as inkjet and screen printing are that it is an additive process, depositing material only where it is needed, and the large flexibility in changing print patterns. Various printing technologies are now introduced in electronics industry, so that many kinds of different electronic components are being manufactured by printing technologies. For application of the printing technologies in manufacturing of electronics, inks or pastes composed of nanoparticles, solvent and additives are basically needed. Herein, we intended to develop a new technology for fabrication of metal nanoparticles with supplying clusters of a source material by sputtering and gas condensation. First, we designed a manufacturing system composed of a rotating spherical quartz chamber containing some amount of fluids, supplying part of source materials by sputtering or evaporation, power supply, vacuum pump and control part. Then, the experimental parameters for manufacturing nanoparticles were systemically optimized. Finally, we could successfully fabricate the non-oxidized metal nanoparticles that are coated with a surfactant/oil mixture held in oil reservoir. In case of Ag, we could manufacture the nanoparticles sized in a range of 5~15 nm in diameter. Field emission scanning electron microscope, transmission electron microscope and energy dispersive spectrometer were used to characterize the particles. More detailed explanation and discussion on the system and particle properties would be proceeded in the conference site. |
