| 학회 |
한국고분자학회 |
| 학술대회 |
2007년 봄 (04/12 ~ 04/13, 제주 ICC) |
| 권호 |
32권 1호 |
| 발표분야 |
고분자 계면 및 표면 |
| 제목 |
Easy shape control to produce various nanoscopic gold patterns from a microscopic mold |
| 초록 |
The capillary force lithography is a synergetic combination with essential feature of nanoimprint lithography and soft lithography using an elastomeric mold such as polydimethylsiloxane (PDMS). This technique enables it to adjust the resolution and feature of periodic nanostructures in a very cost-effective and high-throughput manner without high-pressure process. Here, we introduce various and anisotropic gold patterns upon the thickness of the polymer film and feature dimension of the mold. This polymer pattern based upon CFL can be transferred to underlying gold substrate by reactive ion etching (RIE) and ion-milling to obtain gold patterns, preserving the fidelity of the original structure. The feature of gold pattern could be more varied as a nanoscopic pattern by the thickness of PS film and duration of etching process for removal of residue of PS. |
| 저자 |
정진미1, 김사라1, 양승만1, Francesco Stellacci2, 정희태1
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| 소속 |
1한국과학기술원, 2MIT |
| 키워드 |
Capillary force lithography; PDMS
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| E-Mail |
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