| 초록 |
Among the synthetic methods of graphene, chemical vapor deposition (CVD) is the one of the promising method because it produces high-quality large-area graphene. However, CVD-grown graphene on catalytic substrate (e.g. Cu, Ni) should be transferred onto a target substrate. Here, we developed a new method to transfer CVD-grown graphene onto a target substrate. Pentacene (C22H14), polycyclic aromatic hydrocarbon was used as a supporting layer for clean and doping-free graphene transfer. The use of pentacene enables graphene to be transferred without the effects from residue of the supporting layer, which causes charged impurity scattering and unintentional graphene doping. As a result, field effect transistor fabricated with this clean graphene showed high hole (electron) mobility of 6,532 cm2/V∙s (5,038 cm2/V∙s) with nearly zero Dirac point voltage. |
