| 초록 |
Recently, toxic acidic gas such as hydrofluoric acid and Hydrochloric acid have been used in the semi-conduct industry for their various usage. However, they can cause the pneumonia and pulmonary edema when it was exposed to respiratory organs. Therefore, it was necessary removed of the HF and HCl acids exposed in the industry and also, prepared for the ion selective chemical filter. The foam type anion exchange chemical filter was prepared by impregnation method. The removal behavior of HF and HCl gases using the foam type anion exchange chemical filter were evaluated various gas concentration, flow rate. The maximum amount of adsorbed HF and HCl, Which was adsorbed per 1g of was 100mg. and the amount of HCl in the mixture is higher than the amount of adsorption of HF The adsorption breakthrough for HCl and HF in the mixture were occurred within 60 min. |
