| 초록 |
ZnO film was coated on the polyethylene terephthalate(PET) substrate using plasma polymerization. The hexamethyldisiloxane and diethyl zinc were used as precursors. The deposition rate, X-ray diffraction, surface morphology, light transmission, and WVTR of ZnO thin films were characterized as a function of the substrate temperature. We changed the substrate temperature from 30 ˚C to 130 ˚C. The deposition rate decreased as increasing the substrate temperature. X-ray diffraction showed an amorphous like structure of ZnO with disappearance of (002) orientation at high substrate temperature. The amorphous-like structure of ZnO at the substrate temperature of 130 ˚C resulted in a lower WVTR. The WVTR of single layer ZnO on PET substrate was 5.51 g/m2/day but that of the multi-layered structure of SiOx and ZnO system revealed a significantly improved WVTR. |
