| 학회 | 한국재료학회 |
| 학술대회 | 2017년 가을 (11/15 ~ 11/17, 경주 현대호텔) |
| 권호 | 23권 2호 |
| 발표분야 | G. 나노/박막 재료 분과 |
| 제목 | Hydrogen Gas Sensor using Pd-decorated Al2O3/SrTiO3 heterostructure |
| 초록 | Two-dimensional electron gas (2DEG) at the interface of oxide heterostructure attracted attentions due to their unique physical properties, e.g., on epitaxial LaAlO3/single crystalline SrTiO3 heterostructure. Recently, we reported 2DEG at the interface of amorphous Al2O3/single crystalline SrTiO3 heterostructure by using atomic layer deposition (ALD) technique. The origin is a generation of oxygen vacancies on the SrTiO3 surface due to redox reaction between Al2O3 and SrTiO3 interface during the Al2O3 ALD process. The electrical properties were comparable to epitaxial LaAlO3/SrTiO3 heterostructure with high electron densities of 1013~1014/cm2, which densities are 100 times higher than conventional semiconductor heterojunctions. In this work, we demonstrate high-performance hydrogen gas sensors based on 2DEG at Al2O3/SrTiO3 heterostructure. Pd is decorated on top of the Al2O3/SrTiO3 heterostructure and reacts with hydrogen to form PdHx, which changes the resistance of the 2DEG. The electrons are confined in a few nanometer at the interface of Al2O3/SrTiO3, which exhibited high sensitivity due to its two-dimensional properties. The operation principle will be discussed at the presentation. |
| 저자 | Sung Min Kim1, Hye Ju Kim2, Sang Woon Lee1 |
| 소속 | 1Department of Physics and Department of Energy Systems Research, 2Ajou Univ. |
| 키워드 | Hydrogen Gas Sensor; Two-dimensional electron gas (2DEG); Oxide heterostructure |
