| 학회 | 한국재료학회 |
| 학술대회 | 2014년 봄 (05/15 ~ 05/16, 창원컨벤션센터) |
| 권호 | 20권 1호 |
| 발표분야 | B. 나노 재료(Nanomaterials) |
| 제목 | Hydrogen and Moisture Gettering by Palladium-embedded Porous Alumina Films on Textured Silicon Wafer |
| 초록 | Getter is a class of materials used in absorbing gases such as hydrogen and moisture in microelectronics or semiconductor devices. The existing getter materials, although being essential for applications such as microelectromechanical systems (MEMS) which need a vacuum ambient in their lifetime, were synthesized by evaporating Ti, V, Zr materials in high vacuum and at high temperature, which makes the process expensive and complicated. Also, the heat-induced activation (＞ 150 oC) needed to remove passivation layer after hermetic sealing may damage the adhesion properties in electronics. Therefore, there have been various studies on improving packaging methods, lowering activation temperature, and increasing the absorbing capacity by controlling the structures. Anodic aluminum oxide (AAO) is porous aluminum oxide with hexagonally arranged nanopores fabricated by well-developed anodizing and subsequently utilized in numerous applications such as membrane, template and filter. Especially, gamma-phase alumina, formed by a proper calcinations process, has been used as moisture sensor based on the high reactivity to water and its peculiar porous structure. Also they can be applied to a high-efficiency absorber by imparting nanoparticles, films or functionality to the pore surface or the pore wall due to the high surface area. In this study, we developed a device structure consisting of palladium nanoparticles as hydrogen getter deposited on porous anodized alumina films on textured silicon wafer, which have cost efficiency in materials and processing aspects. The structure was characterized by FE-SEM, XRD, BET and hydrogen/moisture sorption capacity was obtained by analyzing isothermal adsorption/desorption curve. |
| 저자 | Hyo Ryoung Lim1, Nu Si A Eom2, Yo-Min Choi3, Jeong-Ho Cho4, Yong-Ho Choa1 |
| 소속 | 1Department of Fusion Chemical Engineering, 2Hanyang Univ., 3Ansan 426-791, 4Republic of Korea |
| 키워드 | Getter; Absorption/Desorption; Anodic Aluminum Oxide; Palladium; Palladium doped AAO |
