| 초록 |
In flexible optoelectronic device, transparent electrodes are important due to optical and electrical properties. ITO (Indium tin oxide) widely used as a transparent electrode in optoelectronic device. However it is cracked when bending with flexible substrate and hard to process at low temperature. To overcome these problems, we fabricated amorphous IZTO film on flexible substrate by pulsed DC magnetron sputter at various temperatures. To investigate the performance of IZTO film, we fabricated opto-electronic devices with IZTO as a flexible transparent electrode. And mechanical test was performed. |
