| 학회 | 한국화학공학회 |
| 학술대회 | 1996년 가을 (10/18 ~ 10/19, 경북대학교) |
| 권호 | 2권 2호, p.1459 |
| 발표분야 | 공정시스템 |
| 제목 | 실리콘 단결정 표면온도 분포의 최적화 |
| 초록 | Inverse heat conduction problem which determines the surface temperature profile rather than the interior temperature distribution is solved analytically for the crystal part in the Czochralski process. Surface temperature profile is optimal in that it was found through minimizing the objective function which is constructed by integrodifferential equation with some physical meaning. Regularization method is used because of the nature of ill-posedness of the inverse problem. |
| 저자 | 고영덕, 정자훈, 강인석 |
| 소속 | 포항공과대 |
| 키워드 | Optimal control; Inverse problem; Regularization; Czochralski process |
| 원문파일 | 초록 보기 |
