화학공학소재연구정보센터
학회 한국재료학회
학술대회 2021년 봄 (05/12 ~ 05/14, 광주 김대중컨벤션센터)
권호 27권 1호
발표분야 A. 전자/반도체 재료 분과
제목 Effect of LiF on Microwave Dielectric Properties of β–CaSiO3 Ceramics
초록  For ceramic substrate technology, Low Temperature Co-fired Ceramics (LTCC) is a widely used process because of its excellent properties and low cost. One of good candidate materials which can satisfy the requirements of LTCC is β-CaSiO3. However, it is not ease to prepare the dense β-CaSiO3 with single phase by the conventional solid state reaction method due to narrow sintering window. β-CaSiO3 with single phase and high density can be obtained by glass-ceramics with 2-step heat treatment, but processing conditions should be controlled carefully. Based on these consideration, β-CaSiO3 ceramics with xwt.% LiF (0.0≤x≤0.8) were sintered at 950℃ for 3h by conventional solid state reaction method in this study. For the β-CaSiO3 with LiF content above 0.3wt.%, the densification and dielectric properties were greatly improved, and β-CaSiO3 ceramics with 0.5wt.% LiF showed 97.6% of relative density and Qf value(50,160GHz). However, the specimens with higher LiF content than 0.5wt.% showed the degradation of Qf value due to the secondary phase of lithium silicate and abnormal grain growth. Dielectric constant(K) and temperature coefficient of resonant frequency(TCF) of the specimens are also discussed with LiF content. With the addition of LiF, β-CaSiO3 can be prepared by conventional solid state reaction method which could be applicable to LTCC process due to good dielectric properties and low sintering temperature.
저자 Jin Seok Baek1, Eung Soo Kim2
소속 1Department of Materials Engineering, 2Kyonggi Univ.
키워드 β–CaSiO<SUB>3</SUB>; LiF; Microwave dielectric properties; Densification
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