| 학회 | 한국재료학회 |
| 학술대회 | 2012년 가을 (11/07 ~ 11/09, 라카이샌드파인 리조트) |
| 권호 | 18권 2호 |
| 발표분야 | A. 전자/반도체 재료(Electronic and Semiconductor Materials) |
| 제목 | Investigation of Sapphire lapping process using Fixed Diamond Abrasive Pad |
| 초록 | LED (Light-Emitting Diode) is recognized as one of the most effective energy-saving optical device. Sapphire single crystals are widely used as substrate material for opto-electronics such as LED because of its unique properties like high-temperature stability, chemical resistance and higher hardness. These properties make sapphire a suitable alternative for specific applications where conventional substrates cannot provide adequate performance. The lapping process is necessary to control the flatness, thickness and roughness before GaN deposition because they influence to the performance of LED device. However, sapphire lapping process is difficult due to its properties which are mentioned above. Generally, conventional lapping technology uses the metal plate (ex: cast iron, synthetic copper, tin, etc) and high concentration (10~20 wt%) of slurry (micron size and high hardness of abrasive particle with various chemical additives) to lap the sapphire. The use of slurry in conventional lapping process causes the increase of the cost and environmental problems. So, there is a growing interest toward the lapping process which uses the fixed abrasive pad with low concentration of slurry. In this study, sapphire lapping process by lapping pad which uses the diamond as the fixed abrasive with Al2O3 slurry was evaluated. Sapphire with (0001) orientation was lapped using fixed diamond tile pads (3M Trizact) with an alumina slurry containing triethanolamine (TEA) as a dispersant. The effects of lapping parameters such as platen pressure and platen speed were investigated. After basic evaluation of the process, the size of diamond in the fixed abrasive pad and ratio of the particle to the dispersant on the sapphire removal rate was also studied. |
| 저자 | Hailin Xiong1, Hyuk-Min Kim2, R. Manivannan3, Jin-Hyeong Noh2, Deog-Ju Moon1, Jin-Goo Park2 |
| 소속 | 1Department of Materials Engineering, 2Hanyang Univ., 3Department of Bio-Nano Technology |
| 키워드 | lapping; sapphire; fixed abrasive pad; diamond |
