| 학회 |
한국재료학회 |
| 학술대회 |
2006년 봄 (05/19 ~ 05/20, 경상대학교 ) |
| 권호 |
12권 1호 |
| 발표분야 |
나노 및 생체재료 |
| 제목 |
HIGH FREQUENCY PERMEABILITY OF SOFT MAGNETIC CoFeHfO FILMS WITH HIGH RESISTIVITY |
| 초록 |
As-deposited CoFeHfO films have been prepared by reactive RF magnetron sputtering at input power of 300W. The X-ray diffraction (XRD) results exhibit a multi-phases structure, which could be consistent of major phases: α-CoFe (110) and α-CoFe(211) and minor phases CoFe-oxides HfO2 as amorphous matrix, were formed. Moreover, it has also been demonstrated that a nano-crystalline CoFe alloy was obtained and the evaluated sizes were below 15 nm. The thickness effects on the high-frequency characteristics of as-deposited CoFeHfO soft magnetic thin films have been studied in range of 100 nm to 1500 nm. The coercivity (Hc) and anisotropy field (Hk) of these films increases largely with decrease in the film thickness. It is explained to be the result of the change in the film composition and surface roughness. The electrical resistivity (ρ) also increases with decreases in the film thickness. The effective permeability of a CoFeHfO thin film is larger than 1500 and remained constant up to 800 MHz with film thickness below 1500 nm. A CoFeHfO film exhibits excellent high frequency characteristics, which results from softness properties, high ρ, high Hk. |
| 저자 |
L.V. Tho1, K.E. Lee2, S.H. Kim1, C.G. Kim2, C. O. Kim1
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| 소속 |
1Department of Materials Science and Engineering, 2Chungnam National Uiniversity |
| 키워드 |
CoFeHfO; Thin film
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| E-Mail |
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