| 학회 | 한국재료학회 |
| 학술대회 | 2011년 봄 (05/26 ~ 05/27, 제주 휘닉스 아일랜드) |
| 권호 | 17권 1호 |
| 발표분야 | A. Information and Sensor Materials(정보소재 및 센서) |
| 제목 | Low temperature co-firing of lead zirconate titanate thick films with base metal nickel foils |
| 초록 | Low temperature co-firing of lead zirconate titanate (PZT) piezoelectric ceramic thick film with base metal nickel foil was investigated. The sintering temperature of the PZT ceramics was substantially reduced to the co-firable temperature range (~850oC) by liquid phase sintering utilizing small amount of metal oxide flux consisting PbO and CuO with exact stoichiometry of the eutectic composition. Co-firing of the PZT thick films with base metal Ni foil was studied for monolithic piezoelectric device fabrication. LTCC PZT green sheets of the fluxed PZT ceramics were prepared by tape casting, and laminated on base metal foils. Co-firing conditions for the ceramic-metal foil laminates were optimized to achieve sufficient densification of the PZT layer without deformation and/or chemical degradation of the metallic layer. Ceramic-metal interface of the co-fired sample was extensively investigated using crystal structure, microstructure, and chemical composition analyses. To improve the interfacial stability of the co-fired sample, a thin LaNiO3 conducting oxide layer was introduced between PZT and nickel as a buffer. Effects of the LaNiO3 interlayer on the interfacial stability and electrical properties are also discussed. |
| 저자 | 김백현1, 박종훈2, 권도균1 |
| 소속 | 1한국항공대, 2서울대 |
| 키워드 | LTCC; PZT; LaNiO3; Co-firing |
