| 초록 |
The realization of high resolution, large area nanopatterning has been demonstrated from numerous methods. Above all, Proximity field nanoPatterning (PnP) is a unique three dimensional (3D) patterning methods using optical interference from conformal phase masks that contact directly on top of the surface of photosensitive materials. The contact allows incomparable stability in the size of pattering area, resolution, and reproducibility. Extending the thickness and structural degree of freedom of patterned structure are essential topics in my group. In this presentation, I will briefly overview the physics and possible macroporous, inch-scale nanostructures with submicron lattice parameter. Those nanostructures have superior mechanical properties and supply effective thermal and electrical transport pathways for the next generation energy electrodes. |
