| 학회 |
한국화학공학회 |
| 학술대회 |
2007년 봄 (04/19 ~ 04/20, 울산 롯데호텔) |
| 권호 |
13권 1호, p.914 |
| 발표분야 |
재료 |
| 제목 |
Combinatorial approach for ferroelectric material libraries prepared by liquid source misted chemical deposition method |
| 초록 |
Combinatorial approach for novel functional materials in the huge diversity of chemical composition and processing conditions has become more important for breakthrough in thin film electronic and energy-conversion devices. The efficiency of combinatorial method depends on the preparation of a reliable high-density composition thin-film library. Liquid source misted chemical deposition (LSMCD) is a cheap promising combinatorial screening tool. It can control the composition up to ppm level and produce homogeneous multicomponent library. We developed LSMCD method and demonstrated its validity in screening the chemical composition of Bi3.75LaxCe0.25-xTi3O12 (BLCT) for high remanent polarization (Pr). LSMCD method allows us to prepare BLCT thin-film library at the variation of 0.4 mol% of La. Maximum 2Pr is 35 μC/cm2 at x = 0.21. The intensity of (117) XRD peak is quantitatively related to 2Pr. Newly developed scanning piezoelectric deformation measurement for nano-sized samples using SPM is also found out to be reliable for determining the relative ranking of Pr value rapidly. |
| 저자 |
우성일1, 김기웅2, 전민구1, 오광석1, 김태석3, 김윤석4
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| 소속 |
1한국과학기술원 / 초미세화학공정시스템연구센터, 2LG 화학기술(연), 3제일모직, 4한국과학기술원 |
| 키워드 |
Combinatorial chemistry; ferroelectrics; FRAM; BLCT
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| E-Mail |
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| VOD |
VOD 보기 |
| 원문파일 |
초록 보기 |
