| 학회 | 한국재료학회 |
| 학술대회 | 2021년 가을 (11/24 ~ 11/26, 경주 라한호텔) |
| 권호 | 27권 2호 |
| 발표분야 | G. 나노/박막 재료 분과 |
| 제목 | Investigation of Diamond Like Carbon Coating by Using Ethylene/Ar-based Low Frequency PECVD |
| 초록 | Diamond-Like Carbon (DLC) coating was carried on Si, Glass and stainless steel substrates by using home-built Low Frequency Plasma Enhanced Chemical Vapor Deposition equipment. The deposited DLC films were composed of a buffer layer, a middle layer and a DLC active layer. To enhance adhesion of the films, the buffer layer and the middle layer were deposited in SiH4 /Ar and in SiH4/C2H4 /Ar plasma, respectively. The active layer for thick DLC deposition was processed in C2H4/Ar plasma at different conditions. The process variables were LF power (50-150 W), C2H4 gas flow rate (5-20 sccm), and process time (30, 60, 70 min). The deposition rate was about 35 nm/min on the Si substrate. Optical Emission Spectroscopy data was achieved in situ during the DLC deposition. Peaks of argon, hydrogen, carbon were identified. Characterization of film thickness, roughness, hardness, and contact angle were investigated. Detailed results of experiment will be present at the talk. |
| 저자 | 이제원1, 김수겸1, 황보석호1, 박진표1, 박상혁2 |
| 소속 | 1인제대, 2(주)다이아텍 |
| 키워드 | <P>Diamond-like Carbon; Low Frequency; PECVD; Ethylene; Hardness; Buffer Layer </P> |
