초록 |
As a new concept in materials design, a variety of strategies have been developed to fabricate optical microlens arrays (MLAs) that enable the miniaturization of optical systems in micro/nanoscale, improving the characteristic optical performance with unique functionality. Here, we introduce a cost-effective and facile fabrication process in a large scale up to 15 inches via a sequential lithographic method to produce thin and deformable hexagonally arranged MLAs, consisting of polydimethylsiloxane (PDMS). Simple employment of oxygen plasma treatment on the prestrained MLAs effectively harnessed the spontaneous formation of highly uniform nanowrinkled structures on all over the surface of elastomeric microlenses. With strain-controlled tunability, unexpected optical diffraction patterns were characterized by the interference combination effect of the microlens and deformable nanowrinkles. |