| 초록 |
Field emission-scanning electron microscopy (FE-SEM) has been an indispensable tool for the investigation of nanoscale materials and structures. For probing the finer surface structures on non-conductive materials such as polymer film and ceramics, higher accelerating voltage is mainly used for obtaining higher resolution. However, metal coating is required to prevent charging on the surface and the specimen can be damaged by electron beam. In this study, we demonstrate beam deceleration technique in FE-SEM which is improving resolution and reducing beam energy at the same time. By applying a negative voltage to the specimen stage, the electron beam is decelerated and better images are acquired in comparison to the same voltage without beam deceleration. Also the fine surface images of PET, ITO film with high resolution are obtained at 1 kV using beam deceleration technique. |
