화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2020년 가을 (10/05 ~ 10/08, 부산컨벤션센터(BEXCO))
권호 45권 1호
발표분야 분자전자 부문위원회 I
제목 Nano-crack formation on the micro-structure for piezo-resistive pressure sensor with high linearity and flexibility
초록 A piezo-resistive type pressure sensor with high stretchability and linear sensitivity was developed via the in-situ formation of nano-cracks and micro-wrinkles on pyramidal elastomers using the tensile/compressive residual stress applied on metal thin film. The nano-cracks generated in the process of thermal evaporation improved the stretchability, and the micro-wrinkles formed during the deformation of pyramidal structure helped to achieve the linear sensitivity. Furthermore, our pressure sensor maintained its sensing performance even after repeated pressure cycle tests due to high interfacial adhesion between the surface thiolated elastomer and the deposited metal thin film.
저자 고현주1, 김성원2, 조길원2, 이승구1
소속 1울산대, 2포항공과대
키워드 Pressure sensor; Piezo-resistive; Nano-cracks; Micro-wrinkles; Linear sensitivity; Stability
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