| 학회 | 한국화학공학회 |
| 학술대회 | 2007년 가을 (10/26 ~ 10/27, 한국과학기술원) |
| 권호 | 13권 2호, p.2255 |
| 발표분야 | 재료 |
| 제목 | Holographic Fabrication of 3D Nanostructures for Optofluidic Integration |
| 초록 | Multi-dimensionally fabricated microstructures inside microchannels are of great importance for microfluidic mixing, microscale separation of biological materials, chemical microsensors, and microfluidic control of light such as optical waveguides. Although the methods based on colloidal self-assembly are able to produce high quality three-dimensional photonic nanostructures without machinery, practical application of self-assembling strategy has been limited because it takes a long process time with extremely limited controllability compared with the conventional lithographic technique. In this study, we reported new strategy by integrating holographic lithography with photo-lithography for hybrid patterns of microchannels with built-in 3D photonic nanostructures. Microchannels were created by photo-lithography and photonic nanostructures were fabricated by holographic lithography. |
| 저자 | 박성규1, 이승곤1, 문준혁2, 양승만1 |
| 소속 | 1한국과학기술원 생명화학공학과 / 광자유체집적소자연구단, 2삼성종합기술원 |
| 키워드 | holographic lithograpy; optofluidic integration |
| VOD | VOD 보기 |
| 원문파일 | 초록 보기 |
