| 학회 |
한국공업화학회 |
| 학술대회 |
2006년 봄 (05/12 ~ 05/13, 전북대학교) |
| 권호 |
10권 1호 |
| 발표분야 |
우수논문(대학원우수논문) |
| 제목 |
SiC-based ceramic microstructures and microfluidic channels from preceramic polymers |
| 초록 |
A fabrication process of the microfabrication of ceramic materials is an inevitable demand for the devices in the fields of microreactor and MEMS applicable to harsh environments requiring a tolerance to high temperatures, a resistance to corrosion, as well as tribological properties. The study describes the microfabrication of SiC-based ceramic microstructures and the preparation of microfluidic channels using soft lithographic techniques from preceramic polymers. It is believed that the fabrication of SiC-based microstructures and microfluidic channels hold tremendous potential in the field of microreaction technology and micro total analysis systems. |
| 저자 |
박준홍, 윤태호, 이홍주, 김동표
|
| 소속 |
충남대 |
| 키워드 |
microfluidic channels; SiC-based ceramic; microstructures
|
| E-Mail |
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