| 학회 |
한국재료학회 |
| 학술대회 |
2013년 봄 (05/23 ~ 05/24, 여수 엠블호텔(THE MVL)) |
| 권호 |
19권 1호 |
| 발표분야 |
A. 전자/반도체 재료(Electronic and Semiconductor Materials) |
| 제목 |
Properties of Polycrystalline PbTiO3 Thick Films with Different Stress Conditions by Aerosol Deposition |
| 초록 |
Lead titanate (PbTiO3, PT) is an important member of the group of perovskite-structured materials that exhibits useful dielectric, piezoelectric and electromechanical properties. PT with tetragonal phase at room temperature, which is a useful ferroelectric composition, has a high Curie temperature of 490 °C and large tetragonality (c/a = 1.06). In this study, Polycrystalline PT thick films were deposited by using a Aerosol Deposition (AD) method on Si wafer, single crystal yitria-stabilized zirconia (YSZ) wafer and Ni substrates. In this case, the films with different stress conditions were determined by the coefficient of thermal expansion (CTE) misfit of PT films and substrates. The residual stresses of the manufactured PT films by AD method were identified by high-resolution X-ray diffraction system(HR-XRD). Furthermore, The phases of films were analyzed by XRD, and the microstructure and ferroelectric properties were analyzed |
| 저자 |
Jungkeun Lee1, Soohwan Lee2, Min-Geun Choi3, Young-Min Kong4, Jungho Ryu1, Dae-Yong Jeong2
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| 소속 |
1School of Materials Engineering, 2Inha Univ., 3Incheon 402-751, 4Korea. |
| 키워드 |
Aerosol deposition; PbTiO3 film; Ferroelectric; coefficient of thermal expansion (CTE).
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| E-Mail |
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