| 학회 |
한국재료학회 |
| 학술대회 |
2013년 봄 (05/23 ~ 05/24, 여수 엠블호텔(THE MVL)) |
| 권호 |
19권 1호 |
| 발표분야 |
B. 나노재료(Nanomaterials) |
| 제목 |
A comparison of CH4 gas sensing base on different morphological ZnO material |
| 초록 |
ZnO thin film and nanowire structures have been fabricated on SiO2/Si substrate using the DC magnetron sputtering system at room temperature were showing some noticeable attention. Two targets (ZnO and Zn) were used in sputtering system for study and comparison. Porous nanowires and thin film structure are formed with and without single carbon nanotube (SWCNTs) template, respectively. Oxidation was performed at various temperatures ranging from 400℃ – 900℃ in order to improve the qualities of ZnO material both to differentiate the outcome results. The morphology and crystalline quality of samples was investigated by Scanning Electron Microscopy (SEM) and X-ray diffraction (XRD). The result showed that the samples prepared by ZnO target exhibited the quite smooth surface meanwhile the surface of sample film and nanowire prepared by Zn target revealed roughness and grain by grain connection, respectively. Methane (CH4) gas sensing properties are also studied carefully. The samples prepared by Zn target showed high sensitivity and good reproducibility at low working temperature. Gas sensing mechanism was also proposed and discussed. |
| 저자 |
Nguyen Minh Hieu, Nguyen Minh Vuong, DojinKim
|
| 소속 |
Chungnam National Univ. |
| 키워드 |
CH4 gas sensor; porous nanowire; ZnO; high sensitivity; low working temperture
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| E-Mail |
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