학회 | 한국재료학회 |
학술대회 | 2006년 봄 (05/19 ~ 05/20, 경상대학교 ) |
권호 | 12권 1호 |
발표분야 | 나노 및 생체재료 |
제목 | Fabrication of a novel gas sensors based on array of interconnected open ends of carbon nanotubes (CNTs) |
초록 | Carbon nanotubes have been researched for applying to the gas sensor because of their large surface area and high electrical conductivity. The uniformly and highly ordered carbon nanotubes were synthesized into the nanochannels of anodic aluminum oxide on the Ti/p-Si substrate by thermal chemical vapor deposition (CVD) method. The growth temperature was 900 ℃. The open ends of CNTs that connected together by a surface carbon sheet were achieved by changing the growth condition. The morphology and grphitization of carbon nanotubes were characterized by SEM, and Raman spectroscopy. The electrical and gas sensing properties of devices were characterized by I-V tests along the CNTs from the top to the bottom. The gas sensor based on open end CNTs shows fast response time, perfect recovery and reproducibility when changing the atmosphere from N2 to NH3 at room temperature. This new type of CNTs based sensor suggests the possibility to utilize as gas sensor for environmental monitoring. This research was performed with the financial support of the Center for Nanostructured Materials Technology (M105KO010023-05K1501-02410), grant No R01-2004-10104-0 from ministry of science & technology, and KRF-2001-E00042. |
저자 | Nguyen Duc Hoa1, Nguyen Van Quy2, Gyusuk Choi1, Sang Gil Kim2, Yousuk Cho3, Se Young Jeong1, Dojin Kim2 |
소속 | 1Department of Materials Science and Engineering, 2Chungnam National Univ., 3Gumi Institude of Electronics Technology |
키워드 | gas sensors; Carbon nanotubes; Anodic alumium oxide; CVD |