| 학회 |
한국재료학회 |
| 학술대회 |
2009년 봄 (05/21 ~ 05/22, 무주리조트) |
| 권호 |
15권 1호 |
| 발표분야 |
반도체재료 |
| 제목 |
Synthesis of silica nanowires by rapid thermal annealing |
| 초록 |
In this work, we have synthesized amorphous SiO2 nanowires by rapid thermal annealing of Ni/poly-Si/SiO2/Si substrate structures at 900 oC in a nitrogen ambient. It is shown that the diameter of the a-SiO2 nanowires is dependent on the diameter of the NiSi2 catalyst particles; the former is about one third size of the latter. Considering the presence of the nanoparticles located at the tip of the nanowires, the growth behavior of the a-SiO2 nanowires is described through a catalyst driven vapor-liquid-solid(VLS) growth mechanism. |
| 저자 |
Jin-Bok Lee1, Seong-Han Park2, Joon-Ho Oh1, Chel-Jong Choi2, Tae-Yeon Seong1
|
| 소속 |
1Department of Materials Science and Engineering, 2Korea Univ. |
| 키워드 |
silica nanowires; nickel silicide; rapid thermal annealing
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| E-Mail |
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