| 학회 | 한국화학공학회 |
| 학술대회 | 1999년 봄 (04/23 ~ 04/24, 성균관대학교) |
| 권호 | 5권 1호, p.1645 |
| 발표분야 | 재료 |
| 제목 | Ⅲ족 Nitride 증착을 위한 OMVPE 공정에 관한 연구 |
| 초록 | This study reports an effort to elucidate the OMVPE(organometallic vapor phase epitaxy) process used for the deposition of group Ⅲ nitrides from the fundamental view point. Thefocus of this work was mainly put on the understanding of the gas dynamics of theOMVPE reactor and pyrolysis reactions of film precursors occurring inside the reactor.Based on these results, actual film growth was performed and the properties of grownfilms were analyzed. |
| 저자 | 박진호, Timothy J. Anderson |
| 소속 | 영남대 |
| 키워드 | OMVPE; Raman Spectroscopy; Pyrolysis |
| 원문파일 | 초록 보기 |
