| 학회 |
한국공업화학회 |
| 학술대회 |
2013년 봄 (05/01 ~ 05/03, ICC JEJU) |
| 권호 |
17권 1호 |
| 발표분야 |
포스터-무기재료 |
| 제목 |
Transparent SiO2 protective films deposited on Al reflector by PE-CVD for the application of vehicular head lamp |
| 초록 |
In order to prevent the discoloration and oxidization of metal reflector in vehicular head lamp, transparent SiO2 barrier films have been prepared on Al reflector by plasma-enhanced chemical vapor deposition (PE-CVD) from hexamethyldisiloxane (HMDSO) as the precursor and mixtures of Ar/N2O/O2 as the plasma gas. Plasma diagnostics via optical emission spectroscopy (OES) have been carried out in HMDSO/Ar/N2O/O2 discharges for studying the effects of the feed composition on the characteristics of the deposited SiO2 thin films. The study shows that the strong correlations can be found between the feed composition and bonding structure of the thin films. In the O2/HMDSO ratio in the plasma gas, the increase of the oxygen concentration leads to an increase in the growth rate and to the removal of the organic groups from the films, resulting in the reaching a composition close to silicon dioxide. |
| 저자 |
이도경1, 정지혜1, 박민정1, 최성준2, 황현호2
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| 소속 |
1대구가톨릭대, 2인터테크(주) |
| 키워드 |
SiO2 barrier films; PE-CVD; OES; Vehicular head lamp
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| E-Mail |
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