| 초록 |
Microsphere lithography (MSL) is a cost-efficient alternative to more conventional lithographic techniques such as electron-beam lithography (EBL). Based on the self-assembly of microspheres of monodisperse size distribution, MSL is often conducted with polystyrene (PS) microspheres which could be prepared in a wide range of diameters. While conventional MSL utilize hexagonal close-packed monolayers of PS microspheres followed by partial etching of the spheres, direct achievement of non-close-packed arrays is regarded as an interesting alternative. We have recently shown that controlling the swelling and deswelling behavior of PS latex microspheres synthesized using crosslinker can induce non-close-packed monolayers of PS microspheres with short range order. Herein, we report the relationship between the size, composition, and degree of crosslinking of PS microspheres to their behavior in non-close-packed array induction under mixed solvent systems. |
