| 초록 |
In this study, phenolic resins were synthesized of a mixture by phenol and formaldehyde containing various proportions of N-(4-hydroxyphenyl) maleimide (HPMI) in the presence of an acid catalyst. A solution of HPMI-containing phenolic resins in PGMEA was spin-coated on well-cleaned Si substrates. The coated substrates were heated at around 200 °C and then finally cured at 400 °C. The cured films were characterized in terms of their chemical structures and elements, thermal properties, and morphology. |
