| 학회 | 한국공업화학회 |
| 학술대회 | 2005년 가을 (10/28 ~ 10/29, 건국대학교) |
| 권호 | 9권 2호 |
| 발표분야 | 무기재료 |
| 제목 | Application of photocurable PDMS for soft lithographic molding |
| 초록 | Softlithography is extensively used in microfabrication in the areas related to electronics, microtechnology nanotechnology and so on. softlithography has relied primarily on elements made with commertially available silicone elastomers that was designed for other applications. As a result these materials pocess only some of the desired properties like high modulus, elastomeric property and transparency. This paper introduces a modified photocurable PDMS that has the properties which meet many of the requirements listed above along with advantages such as uv-curability, which greatly reduce proces time. We demonstrate its application in representative soft lithographic patterning that high light some of its attractive features. |
| 저자 | 김석선, 김동표 |
| 소속 | 충남대 |
| 키워드 | photocurable PDMS; Softlithography |
